
LEM Series
实时干涉工艺监测仪可在蚀刻/沉积制程中对薄膜厚度和沟槽深度进行高精度检测。规格参数 System outline LEM camera consists of a compact interference measurement section that includes the laser source, light receiver, and op
- 型号/名称
- LEM Series
- System outline
- LEM camera consists of a compact interference measurement section that includes the laser source, light receiver, and optical components, as well as the illumination and CCD imaging camera, allowing monitoring of any area of the wafer surf…
- Light source
- Laser diode
- Light source wavelengths
- 670 nm, 905 nm, 980 nm










