AXXIS
AXXIS™ - Facilitates multiple deposition techniques and co-deposited films efficiently!
广西科米瑞实验仪器设备有限公司提供 Kurt J. Lesker AXXIS 产品资料、选型咨询、供货报价和售后服务支持,价格面议。
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:AXXIS™ - Facilitates multiple deposition techniques and co-deposited films efficiently!
:The University of Alberta uses our AXXIS for glancing angle depositions (GLAD).
:Automate Your Lab.
:18" diameter x 15" deep cylindrical 304 stainless steel chamber
:Six radial process ports
:Hinged front-loading door
:Door- or port-mounted substrate fixtures
:Turbomolecular or cryogenic pumping
:Available with up to six TORUS ® circular magnetron sputtering sources
:Available with up to 6-pocket 5.5kW electron beam source
:Available with up to three thermal evaporation sources
:Optional ion source
:Open framework
:Instrument rack
:Typical Applications
:R&D Thin Film Deposition
:Substrate fixture indexing and rotation
:Computer-controlled process automation
:Process Options
:Ion Source for Substrate Cleaning/Assisted Deposition
:Architecture Overview
:Kurt J. Lesker Company ® eKLipse™ Controls Software is utilized on all KJLC platforms. The eKLipse™ controls platform utilizes a .NET application running on a Windows PC for its User Interface and Recipe Editor. Equipment automation is accomplished via a standalone Real Time Controller.
| 型号 | AXXIS |
|---|---|
| Product category | Sputtering System |
| 技术规格 1 | AXXIS™ - Facilitates multiple deposition techniques and co-deposited films efficiently! |
| 技术规格 2 | The University of Alberta uses our AXXIS for glancing angle depositions (GLAD). |
| 技术规格 3 | 18" diameter x 15" deep cylindrical 304 stainless steel chamber |
| 技术规格 4 | Six radial process ports |
| 技术规格 5 | Door- or port-mounted substrate fixtures |
| 技术规格 6 | Turbomolecular or cryogenic pumping |
| 技术规格 7 | Available with up to six TORUS ® circular magnetron sputtering sources |
| 技术规格 8 | Available with up to 6-pocket 5.5kW electron beam source |
| 技术规格 9 | Available with up to three thermal evaporation sources |
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| 技术规格 10 | Optional ion source |
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