CMS
Automate Your Lab.。:Extremely capable, advanced research tool
广西科米瑞实验仪器设备有限公司生产销售 Kurt J. Lesker CMS,可提供产品参数、报价和售后服务咨询,价格面议。
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:Automate Your Lab.
:Extremely capable, advanced research tool
:Designed to accommodate specific thin film applications such as GMR, CMS, Semiconductor, Nanoscale devices, Photonics, and Photovoltaics
:Unique system design can be configured for true Ultra High Vacuum performance
:Field tested and proven design
:Applications
:Giant Magnetoresistance (GMR)
:Combinatorial Materials Science (CMS)
:Semiconductor
:Superconductor
:Nanoscale devices
:Photovoltaics (PV)
:Organic films
:Adaptable chamber, base plate, and substrate options
:18" D x 15" H SS process chamber
:Substrate Handling
:Rotating substrate platen for up to 150mm (6") substrates
:Substrate heating to 800°C with quartz lamp heater
:Single or multi-wafer load lock with manual or computer controlled sample transfer
:High precision PID temperature control loop (when equipped with substrate heating)
:Pumping & Gauging
:1500 l/s Cryo pump
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