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CMS (Combinatorial Materials Science) Series Advanced Research System Utilizing Sputtering or Electron Beam Techniques

CMS

Automate Your Lab.。:Extremely capable, advanced research tool

品牌: Kurt J. Lesker价格: 面议服务区域: 全国

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CMS (Combinatorial Materials Science) Series Advanced Research System Utilizing Sputtering or Electron Beam Techniques

:Automate Your Lab.

:Extremely capable, advanced research tool

:Designed to accommodate specific thin film applications such as GMR, CMS, Semiconductor, Nanoscale devices, Photonics, and Photovoltaics

:Unique system design can be configured for true Ultra High Vacuum performance

:Field tested and proven design

:Applications

:Giant Magnetoresistance (GMR)

:Combinatorial Materials Science (CMS)

:Semiconductor

:Superconductor

:Nanoscale devices

:Photovoltaics (PV)

:Organic films

:Adaptable chamber, base plate, and substrate options

:18" D x 15" H SS process chamber

:Substrate Handling

:Rotating substrate platen for up to 150mm (6") substrates

:Substrate heating to 800°C with quartz lamp heater

:Single or multi-wafer load lock with manual or computer controlled sample transfer

:High precision PID temperature control loop (when equipped with substrate heating)

:Pumping & Gauging

:1500 l/s Cryo pump

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