NANO 36™ Affordable, Compact Sputtering or Thermal Evaporation Thin Film Deposition System

：Automate Your Lab.

：The Kurt J. Lesker Company® NANO 36™ is our optimized, entry level deposition system. Our chamber design is uniquely suited for glovebox integration. With increased capabilities and a smaller footprint, the NANO 36 provides an accessible price point while maintaining the quality you expect from KJLC.

：The NANO 36 is compatible with the following deposition techniques:

：Thermal Evaporation (up to four 2" boat assemblies).

：Torus® Magnetron Sputtering sources (up to three 2" or 3" sources).

：1cc or 10cc LTE Organic deposition sources (up to four).

：Combination of two Thermal and two LTE sources.

：Custom configurations are available upon request.

：KJLC's software allows user friendly recipe creation along with a reliable, uninterruptable processing module that allows process completion, regardless of the state of the computer user interface. For more information on this intuitive, unique, and reliable software package, please see the Software Tab .

：KJLC-RV Series

：TORUS ® Mag Keeper™

：KJLC ® RF03 Power Supply Package

：KJLC ® LTE10 Organic Source

：Pfeiffer HIPACE 300 Turbopump

：Edwards nXDS6i Manual

：Process Chamber

：Removable and reconfigurable top and bottom plates on ISO 250 ports (10" tube)

：Horizontally oriented cylindrical stainless steel chamber body

：Spring-loaded, pendulum style, full-access, aluminum front door

：Appropriate pumping, process, gauging and instrumentation ports are included

：Quantity (2) viewports included in the chamber door. Viewports each have 1.26" Ø viewing area.

：Vacuum Pumping & Gauging