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LAB Line High-Performance UHV Platform Optimized for Magnetron Sputtering Applications

LAB Line UHV

Automate Your Lab.。:The Kurt J. Lesker Company ® LAB Line UHV Sputter platform is purpose built for magnetron sputtering deposition applications. A chamber design tailored to fit

品牌: Kurt J. Lesker价格: 面议服务区域: 全国

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LAB Line High-Performance UHV Platform Optimized for Magnetron Sputtering Applications
说明规格FAQ

说明

:Automate Your Lab.

:The Kurt J. Lesker Company ® LAB Line UHV Sputter platform is purpose built for magnetron sputtering deposition applications. A chamber design tailored to fit UHV sputter process needs, an industry best software control system with advanced programming, load lock capability, and numerous features for optimized thin film performance are a few of the advantages offered in this innovative design.

:The LAB Line series is compatible with the following techniques:

:TORUS ® Magnetron Sputtering (up to 12 sources)

:Custom configurations are available upon request

:KJLC's innovative eKLipse™ software allows user-friendly recipe creation along with a graphical user interface that is intuitive for new PVD users whilst advanced for seasoned professionals. For more information on this intuitive, unique, and reliable software package, please see the Software Tab.

:Applications:

:R&D Sputter Deposition

:Microelectronics (Metals, Metal Oxides, Dielectrics)

:Data Storage (Magnetic thin films)

:Magnetic Tunnel Junctions

:Superconducting Materials

:Josephson Junctions

:Optical Films and Photonics

:TORUS ® Mag Keeper™

:KJLC ® RF03 Power Supply Package

:KJLC RF06 Power Supply

:HIPIMS Power Supply

:Brooks CTI8F Cryo Pump

:Edwards nXDS10i Scroll Pump

:Pfeiffer HiPace 1200

:Edwards nXDS35i

规格

型号LAB Line UHV
Product categorySputtering System
技术规格 1TORUS ® Magnetron Sputtering (up to 12 sources)
技术规格 2Custom configurations are available upon request
技术规格 3R&D Sputter Deposition
技术规格 4KJLC ® RF03 Power Supply Package
技术规格 5KJLC RF06 Power Supply
技术规格 6HIPIMS Power Supply
技术规格 7Brooks CTI8F Cryo Pump
技术规格 8Edwards nXDS10i Scroll Pump

FAQ

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