LAB Line UHV
Automate Your Lab.。:The Kurt J. Lesker Company ® LAB Line UHV Sputter platform is purpose built for magnetron sputtering deposition applications. A chamber design tailored to fit
广西科米瑞实验仪器设备有限公司提供 Kurt J. Lesker LAB Line UHV 产品资料、选型咨询、供货报价和售后服务支持,价格面议。
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:Automate Your Lab.
:The Kurt J. Lesker Company ® LAB Line UHV Sputter platform is purpose built for magnetron sputtering deposition applications. A chamber design tailored to fit UHV sputter process needs, an industry best software control system with advanced programming, load lock capability, and numerous features for optimized thin film performance are a few of the advantages offered in this innovative design.
:The LAB Line series is compatible with the following techniques:
:TORUS ® Magnetron Sputtering (up to 12 sources)
:Custom configurations are available upon request
:KJLC's innovative eKLipse™ software allows user-friendly recipe creation along with a graphical user interface that is intuitive for new PVD users whilst advanced for seasoned professionals. For more information on this intuitive, unique, and reliable software package, please see the Software Tab.
:Applications:
:R&D Sputter Deposition
:Microelectronics (Metals, Metal Oxides, Dielectrics)
:Data Storage (Magnetic thin films)
:Magnetic Tunnel Junctions
:Superconducting Materials
:Josephson Junctions
:Optical Films and Photonics
:TORUS ® Mag Keeper™
:KJLC ® RF03 Power Supply Package
:KJLC RF06 Power Supply
:HIPIMS Power Supply
:Brooks CTI8F Cryo Pump
:Edwards nXDS10i Scroll Pump
:Pfeiffer HiPace 1200
:Edwards nXDS35i
| 型号 | LAB Line UHV |
|---|---|
| Product category | Sputtering System |
| 技术规格 1 | TORUS ® Magnetron Sputtering (up to 12 sources) |
| 技术规格 2 | Custom configurations are available upon request |
| 技术规格 3 | R&D Sputter Deposition |
| 技术规格 4 | KJLC ® RF03 Power Supply Package |
| 技术规格 5 | KJLC RF06 Power Supply |
| 技术规格 6 | HIPIMS Power Supply |
| 技术规格 7 | Brooks CTI8F Cryo Pump |
| 技术规格 8 | Edwards nXDS10i Scroll Pump |
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