ASM International Epsilon 2000 单片外延沉积系统
Epsilon 2000 是 ASM 官网列出的单片外延工具，支持 150 mm 和 200 mm 晶圆的多种外延应用。
- 型号
- Epsilon 2000
- 产品名称
- Epsilon® 2000
- 产品说明
- Our Epsilon 2000 single-wafer epitaxy tool offers a wide variety of epitaxy applications for 150 mm and 200 mm wafers. They range from high-temperature silicon for wafer preparation to low-temperature selective or non-selective silicon