
ASM International XP8 Magma PEALD 等离子体增强原子层沉积系统
XP8 Magma PEALD 是面向先进节点存储器和逻辑制造的 300 mm 等离子体增强原子层沉积系统。规格参数 型号:XP8 Magma PEALD。产品名称:XP8® Magma PEALD。英文
- 型号
- XP8 Magma PEALD
- 产品名称
- XP8® Magma PEALD
- 产品说明
- XP8® Magma is a state-of-the-art 300 mm plasma-enhanced atomic layer deposition (PEALD) system engineered for advanced node memory and logic manufacturing. It delivers high productivity and supports a comprehensive range of dielectric PEALD










